Shenzhen Creatom Technology Co., Ltd

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Atomic Level Technical Services

Over the past 15 years, our team have been focusing on the development of Gas Cluster Ion Beam Technology (GCIB), an innovative solution to next-generation semiconductor manufacturing. Compared to tranditional equipment, GCIB holds uncomparable advantages in surface planarization, shallow implanatation, and selective etching. In 2025, the world's highest-flux GCIB system would be in operation, creating unfathomable capabilities for the exploration for future technology innvations.

Ultra-Shallow Ion Implantation

Ultra-shallow ion implantation service enables sub-5nm ion implan-tation with a resolution of up to 0.6 nm. This technique allows for precise control over the depth, concentration and distribution of implantation. This technology efficiently enhance the performance of semiconductor devices and improve their electrical properties. All of these can meet the demands for high performance and density of modern integre-ted circuits.

Selective Etching

The service realizes selective etching of different materials. This tech-nology can refine the microstructure of different materials and realize maskless imaging.

Non-destructive cleaning

Our non-destructive cleaning utlizes atomic level cluster beam techno-logy. This technology is capable to remove nanoscale particles, natural oxidized layers, metal contamination, organics, and other impurities from the wafers (as larde as 8").

Atomic Level Deposition

Atomic level deposition is an advanced deposition technique that allows for ultra-thin films of a few nanometres to be deposited in a precisely controlled way.It is suitable for various subtrates with different shaps, enjoys excellent 3D conformality, high surface flatness and adhesion.

Surface Smoothing

Our atomic level surface smoothing technology can smooth the material surface to atomic level, Ra<0.5nm, providing an ideal substrate for later processes.

+86 18924592675；+86 13302928437
marketing@creatom.com

#4 601 ,Hongchuang Technolody Center, Longhua District, Shenzhen

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